15 citations · 38 across the 7 of their papers we have counts for
3 papers · 1 filter
In-poor IGZO: superior resilience to hydrogen in forming gas anneal and PBTI
A. Kruv, M. J. van Setten, A. Chasin +12
Integrating In-Ga-Zn-oxide (IGZO) channel transistors in silicon-based ecosystems requires the resilience of the channel material to hydrogen treatment. Standard IGZO, containing 4…
Size Effect on Raman Measured Stress and Strain Induced Phonon Shifts in Ultra-Thin Film Silicon
Christopher Pashartis, Michiel J. van Setten, Geoffrey Pourtois
The fabrication of complex nano-scale structures, which is a crucial step in the scaling of (nano) electronic devices, often leads to residual stress in the different layers presen…
Computing Elastic Tensors of Amorphous Materials from First-Principles
C. Pashartis, M. J. van Setten, M. Houssa +1
Advancements in modern semiconductor devices increasingly depend on the utilization of amorphous materials and the reduction of material thickness, pushing the boundaries of their…