3 citations · 4 across the 7 of their papers we have counts for
Showing 2026 · quant-phShow all
2 papers · 2 filters
quant-ph2026
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter hi…
quant-ph2026
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Simon J. K. Lang, Ignaz Eisele, Alwin Maiwald +8
Aluminum (Al) remains the central material for superconducting qubits, and considerable effort has been devoted to optimizing its deposition and patterning for quantum devices. How…