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20232025
most citedDifferential deposition applied to x-ray mirror substrate

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physics.app-ph2024

Surface figure correction using differential deposition of WSi

Ch. Morawe, P. Bras, S. Labouré +2

The surface figure of an x-ray mirror was improved by differential deposition of WSi layers. DC magnetron sputtering through beam-defining apertures was applied on moving subst…