3 papers
physics.optics2025
X-ray mirror figure correction using differential deposition
Ch. Morawe, S. Labouré, F. Perrin +2
The surface figure of x-ray mirrors can be improved by differential deposition of thin films. To achieve the required corrections, WSi2 layers of variable thickness were deposited…
physics.app-ph2024
Surface figure correction using differential deposition of WSi
Ch. Morawe, P. Bras, S. Labouré +2
The surface figure of an x-ray mirror was improved by differential deposition of WSi layers. DC magnetron sputtering through beam-defining apertures was applied on moving subst…
physics.app-ph2023
Differential deposition applied to x-ray mirror substrate
Patrice Bras, Sylvain Labouré, Amparo Vivo +2
The process of differential deposition is currently applied at the ESRF in order to correct figure errors of x-ray optics substrates, prior to multilayer deposition. The substrate…