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physics.optics2026
High-resolution TEM imaging on 3D nanocrystals with tilt illuminations
Tsumoru Shintake
When we observe 3D objects, such as nanocrystals using a transmission electron microscope (TEM), the significant depth of the sample causes the contrast transfer function (CTF) to…
physics.optics2025
High-NA In-Line Projector for EUV Lithography
Tsumoru Shintake
This paper proposes a simple, four-mirror, in-line projector for high-NA EUV lithography that eliminates the most troublesome mask 3D effect. The design consists of a two-stage con…
physics.optics2024
Can we improve the energy efficiency of EUV lithography?
Tsumoru Shintake
This paper discusses a simple, low-cost, highly efficient two-mirror projector with a simplified illumination system. The EUV source power can be reduced by 1/10 compared to the cu…