2 papers
physics.optics2026
High-resolution TEM imaging on 3D nanocrystals with tilt illuminations
Tsumoru Shintake
When we observe 3D objects, such as nanocrystals using a transmission electron microscope (TEM), the significant depth of the sample causes the contrast transfer function (CTF) to…
physics.optics2025
High-NA In-Line Projector for EUV Lithography
Tsumoru Shintake
This paper proposes a simple, four-mirror, in-line projector for high-NA EUV lithography that eliminates the most troublesome mask 3D effect. The design consists of a two-stage con…