4 papers
Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation
Yang Shen, Shangzhi Song, Tao Chen +4
As integrated circuits continue to scale down and adopt three-dimensional (3D) stacking, thermal management in the back-end-of-line (BEOL) has emerged as a critical design constrai…
Hybrid Particle Swarm Optimization for Fast and Reliable Parameter Extraction in Thermoreflectance
Bingjia Xiao, Tao Chen, Wenbin Zhang +2
Frequency-domain thermoreflectance (FDTR) is a widely used technique for characterizing thermal properties of multilayer thin films. However, extracting multiple parameters from FD…
Extending the Low-Frequency Limit of Time-Domain Thermoreflectance via Periodic Waveform Analysis
Mingzhen Zhang, Tao Chen, Shangzhi Song +5
Time-domain thermoreflectance (TDTR) is a powerful technique for characterizing the thermal properties of layered materials. However, its effectiveness at modulation frequencies be…
Simultaneous Measurement of Thermal Conductivity, Heat Capacity, and Interfacial Thermal Conductance by Leveraging Negative Delay-Time Data in Time-Domain Thermoreflectance
Mingzhen Zhang, Tao Chen, Ao Zeng +3
Time-domain thermoreflectance (TDTR) is a widely used technique for characterizing the thermal properties of bulk and thin-film materials. Traditional TDTR analyses typically focus…