4 papers
LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching
Yao Lai, Xuyuan Xiong, Zeyue Xue +7
In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask. As circuit features shrink below the wavelength of light, optical…
AnalogCoder-Pro: Unifying Analog Circuit Generation and Optimization via Multi-modal LLMs
Yao Lai, Souradip Poddar, Sungyoung Lee +5
Despite recent advances, analog front-end design still relies heavily on expert intuition and iterative simulations, which limits the potential for automation. We present AnalogCod…
LLM-Enhanced Bayesian Optimization for Efficient Analog Layout Constraint Generation
Guojin Chen, Keren Zhu, Seunggeun Kim +4
Analog layout synthesis faces significant challenges due to its dependence on manual processes, considerable time requirements, and performance instability. Current Bayesian Optimi…
Efficient Bilevel Source Mask Optimization
Guojin Chen, Hongquan He, Peng Xu +2
Resolution Enhancement Techniques (RETs) are critical to meet the demands of advanced technology nodes. Among RETs, Source Mask Optimization (SMO) is pivotal, concurrently optimizi…