most citedHigh- membrane resonators using ultra-high-stress crystalline TiN films

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cond-mat.mes-hall2025★ 1 cited

High- membrane resonators using ultra-high-stress crystalline TiN films

Yuki Matsuyama, Shotaro Shirai, Ippei Nakamura +6

High-quality-factor () mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as…