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eess.AS2026
Modeling and Design of a Diaphragm-Integrated Photonic Waveguide Microphone
Xiaoyu Niu, Yuqi Meng, Zihuan Liu +2
Can an integrated optical readout improve the useful operating range of a miniature microphone? We address this question with an analytical model of a diaphragm carrying the sensin…
eess.AS2026
Performance Analysis and Design of an Optomechanical Microphone Using an Integrated Photonic Waveguide Interferometer
Xiaoyu Niu, Yuqi Meng, Zihuan Liu +2
We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strai…
eess.AS2026
MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype
Xiaoyu Niu, Zihuan Liu, Ehsan Vatankhah +2
This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a c…