most citedBimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers

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eess.AS2026

MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype

Xiaoyu Niu, Zihuan Liu, Ehsan Vatankhah +2

This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a c…