A 5.9 GHz Sezawa SAW Acoustic Delay Line Based on Al0.6Sc0.4N-on-Sapphire with Propagation Q-factor > 3,000

Chin-Yu Chang, Xiaolei Tong, Pedram Yousefian +3

In this work, we demonstrate a high-performance surface acoustic wave (SAW) delay line based on a Scandium alloyed aluminum nitride (AlScN)-on-sapphire platform operating at 5.9 GH…