40 citations · 93 across the 12 of their papers we have counts for
5 papers · 1 filter
Toward Ku-Band Surface Acoustic Wave Delay Lines on AlScN-on-Diamond with Decoupled Phase and Group Velocities
Tzu-Hsuan Hsu, Kapil Saha, Yuchen Ma +4
This work reports surface acoustic wave (SAW) acoustic delay lines (ADLs) on an aluminum scandium nitride (AlScN) on diamond platform operating in the X band and approaching the Ku…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes
Sinwoo Cho, Omar Barrera, Pietro Simeoni +6
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (P…
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride
Sinwoo Cho, Omar Barrera, Pietro Simeoni +8
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency…
A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9%
Xuanyi Zhao, Onurcan Kaya, Michele Pirro +4
This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration…