40 citations · 93 across the 12 of their papers we have counts for
13 papers
Toward Ku-Band Surface Acoustic Wave Delay Lines on AlScN-on-Diamond with Decoupled Phase and Group Velocities
Tzu-Hsuan Hsu, Kapil Saha, Yuchen Ma +4
This work reports surface acoustic wave (SAW) acoustic delay lines (ADLs) on an aluminum scandium nitride (AlScN) on diamond platform operating in the X band and approaching the Ku…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing
Gaia Giubilei, Farah Ben Ayed, Yvonne Sautriot +6
This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Plasmonically Enhanced Flexural-Mode AlScN Nanoplate Resonator as Uncooled and Ultrafast IR Detector with High Responsivity
Aurelio Venditti, Walter Gubinelli, Enise F. Altin +4
This letter introduces a novel class of miniaturized, uncooled, and ultra-fast infrared (IR) resonant thermal detectors (RTDs) based on 30%-doped Aluminum Scandium Nitride (AlScN)…
Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Walter Gubinelli, Ryan Tetro, Pietro Simeoni +2
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated…
High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz
Luca Spagnuolo, Luca Colombo, Kapil Saha +3
This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental re…
ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
Luca Colombo, Luca Spagnuolo, Kapil Saha +3
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Car…
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector
Omar Barrera, Nishanth Ravi, Kapil Saha +12
This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAl…
Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication
Walter Gubinelli, Pietro Simeoni, Ryan Tetro +2
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) f…
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes
Sinwoo Cho, Omar Barrera, Pietro Simeoni +6
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (P…
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride
Sinwoo Cho, Omar Barrera, Pietro Simeoni +8
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency…
A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9%
Xuanyi Zhao, Onurcan Kaya, Michele Pirro +4
This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration…