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most citedEffect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS

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physics.plasm-ph2025

Deposition rate and energy to substrate in chopped and standard HiPIMS: identifying optimal pulse parameters

Mina Farahani, Jiří Čapek, Tomáš Kozák

High-Power Impulse Magnetron Sputtering (HiPIMS) delivers higher ionisation of the target material at the expense of lower deposition rates than conventional magnetron sputtering.…