1 citations · 1 across the 4 of their papers we have counts for
4 papers
Enhanced hydrogen response of copper-doped TiO synthesised by helium-assisted magnetron sputtering
Akash Kumar, Nirmal Kumar, David Kolenatý +4
Cu-doped TiO thin films for hydrogen sensing were synthesised by reactive DC magnetron sputtering in Ar/O/He mixtures, with the He fraction used as a control parameter for…
Deposition rate and energy to substrate in chopped and standard HiPIMS: identifying optimal pulse parameters
Mina Farahani, Jiří Čapek, Tomáš Kozák
High-Power Impulse Magnetron Sputtering (HiPIMS) offers higher ionized flux fractions at the cost of lower deposition rates compared to conventional DCMS. A fine optimization of th…
On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces
M. Farahani, T. Kozák, A. D. Pajdarová +2
High-power impulse magnetron sputtering (HiPIMS) delivers a high target power in short pulses, enhancing the ionization and energy of sputtered atoms and providing thus more possib…
Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
M. Farahani, T. Kozák, A. D. Pajdarová +1
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons…