40 citations · 65 across the 17 of their papers we have counts for
5 papers · 1 filter
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
Phononic Combs in Lithium Niobate Acoustic Resonators
Ian Anderson, Jack Kramer, Tzu-Hsuan Hsu +3
Frequency combs consist of a spectrum of evenly spaced spectral lines. Optical frequency combs enable technologies ranging from timing, LiDAR, and ultra-stable signal sources. Micr…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Taran Anusorn, Omar Barrera, Jack Kramer +4
This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specific…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…