40 citations · 65 across the 17 of their papers we have counts for
18 papers
Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator
Ziqian Yao, Ian Anderson, Tzu-Hsuan Hsu +3
High quality factor () and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high and suffi…
In-Plane Q Anisotropy of Higher-Order XBARs in 128°Y-Cut Lithium Niobate
Byeongjin Kim, Ian Anderson, Ruochen Lu
128Y-cut lithium niobate (LN) laterally field-excited higher-order antisymmetric bulk acoustic resonators (XBARs) have attracted interest for high-frequency acoustic device…
High Coupling Tunable Acoustic Resonators in Monolithic Barium Titanate
Ian Anderson, Agham Posadas, Alexander A. Demkov +1
The growing number of wireless communication bands has driven demand for compact, low-loss, and frequency adjustable RF filtering. Tunable acoustic resonators are well suited to ad…
Thin Film AlN Microbolometer for Very Long-Wave Infrared Detection
Vivek Tallavajhula, Zarko Sakotic, Ian Anderson +3
We demonstrate a suspended thin-film aluminum nitride (AlN) microbolometer for narrowband very long-wave infrared detection. The device uses a 100-nm-thick AlN membrane suspended a…
Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +1
In this work, we experimentally investigate the gradient stress (sigma1) in 128 deg Y-cut transferred thin film lithium niobate (TFLN) films with thicknesses from 100 to 460 nm usi…
Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Omar Barrera, Bryan T. Bosworth, Taran Anusorn +10
Compact, high-performance components in millimeter-wave (mmWave) communication systems demand new acoustic filter technology at increasingly higher frequencies. Among various promi…
Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate
Ian Anderson, Agham Posadas, Alexander A. Demkov +1
The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonato…
Lattice XBAR Filters in Thin-Film Lithium Niobate
Taran Anusorn, Byeongjin Kim, Ian Anderson +2
This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-ba…
Uncooled low-noise thin-film optomechanical resonator for thermal sensing on lithium niobate
Yue Yu, Ran Yin, Ian Anderson +9
Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently lo…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
Phononic Combs in Lithium Niobate Acoustic Resonators
Ian Anderson, Jack Kramer, Tzu-Hsuan Hsu +3
Frequency combs consist of a spectrum of evenly spaced spectral lines. Optical frequency combs enable technologies ranging from timing, LiDAR, and ultra-stable signal sources. Micr…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design
Taran Anusorn, Omar Barrera, Jack Kramer +4
This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specific…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…
Low-Loss Higher-Order Cross-Sectional Lamé Mode SAW Devices in 10-20 GHz Range
Ian Anderson, Tzu-Hsuan Hsu, Vakhtang Chulukhadze +6
This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 5…
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector
Omar Barrera, Nishanth Ravi, Kapil Saha +12
This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAl…
2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate
Vakhtang Chulukhadze, Jack Kramer, Tzu-Hsuan Hsu +5
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonator…
23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW
Sinwoo Cho, Omar Barrera, Jack Kramer +5
This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52…