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20232026
most citedRoadmap on Atomic-scale Semiconductor Devices

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cond-mat.mtrl-sci2023

Detection Sensitivity Limit of Hundreds of Atoms with X-Ray Fluorescence Microscopy

Mateus G. Masteghin, Toussaint Gervais, Steven K. Clowes +10

We report X-ray fluorescence (XRF) imaging of nanoscale inclusions of impurities for quantum technology. A very bright diffraction-limited focus of the X-ray beam produces very hig…