77 citations · 122 across the 4 of their papers we have counts for
1 paper · 2 filters
T. Schenkel, A. M. Tyryshkin, R. de Sousa +7
We implanted ultra low doses (2x10^11 cm-2) of 121Sb ions into isotopically enriched 28Si and find high degrees of electrical activation and low levels of dopant diffusion after ra…