most citedResolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition

60 citations · 90 across the 2 of their papers we have counts for

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cond-mat.mtrl-sci2009★ 30 cited

Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

Vinzenz Friedli, Ivo Utke, Kristian Molhave +1

Bending and vibration tests performed inside the scanning electron microscope were used to mechanically characterize high-aspect pillars grown by focused electron-beam (FEB) induce…