60 citations · 90 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2009★ 30 cited
Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2
Vinzenz Friedli, Ivo Utke, Kristian Molhave +1
Bending and vibration tests performed inside the scanning electron microscope were used to mechanically characterize high-aspect pillars grown by focused electron-beam (FEB) induce…
cond-mat.other2007★ 60 cited
Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition
Ivo Utke, Vinzenz Friedli, Martin Purrucker +1
The key physical processes governing resolution of focused electron-beam and ion-beam-assisted chemical vapor deposition are analyzed via an adsorption rate model. We quantify for…