19 citations · 22 across the 7 of their papers we have counts for
4 papers · 1 filter
Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS
Jyotish Patidar, Oleksandr Pshyk, Lars Sommerhäuser +1
Ionized physical vapor deposition techniques, such as high-power impulse magnetron sputtering (HiPIMS) are gaining popularity due to their ability to produce high-quality thin film…
Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering
K. Thorwarth, M. Watroba, O. Pshyk +6
Ternary transition metal nitride coatings are promising for many applications as they can offer improved hardness and oxidation resistance compared to binary counterparts. A common…
Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
Jyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen +2
Fueled by the 5G revolution, the demand for advanced radio frequency micro-electromechanical systems (MEMS) based on AlScN is growing rapidly. However, synthesizing high-quality, t…
Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects
O. V. Pshyk, J. Patidar, S. Siol
The crystalline quality and degree of c-axis orientation of hexagonal AlN thin films correlate directly with their functional properties. Therefore, achieving AlN thin films of hig…