11 citations · 11 across the 2 of their papers we have counts for
2 papers
cs.LG2025
Detecting Defective Wafers Via Modular Networks
Yifeng Zhang, Bryan Baker, Shi Chen +4
The growing availability of sensors within semiconductor manufacturing processes makes it feasible to detect defective wafers with data-driven models. Without directly measuring th…
cs.LG2023★ 11 cited
Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting
Angzhi Fan, Yu Huang, Fei Xu +1
The semiconductor industry is one of the most technology-evolving and capital-intensive market sectors. Effective inspection and metrology are necessary to improve product yield, i…