27 citations · 46 across the 7 of their papers we have counts for
7 papers
Detecting Defective Wafers Via Modular Networks
Yifeng Zhang, Bryan Baker, Shi Chen +4
The growing availability of sensors within semiconductor manufacturing processes makes it feasible to detect defective wafers with data-driven models. Without directly measuring th…
Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting
Angzhi Fan, Yu Huang, Fei Xu +1
The semiconductor industry is one of the most technology-evolving and capital-intensive market sectors. Effective inspection and metrology are necessary to improve product yield, i…
Soft Sensing Model Visualization: Fine-tuning Neural Network from What Model Learned
Xiaoye Qian, Chao Zhang, Jaswanth Yella +3
The growing availability of the data collected from smart manufacturing is changing the paradigms of production monitoring and control. The increasing complexity and content of the…
Soft-Sensing ConFormer: A Curriculum Learning-based Convolutional Transformer
Jaswanth Yella, Chao Zhang, Sergei Petrov +4
Over the last few decades, modern industrial processes have investigated several cost-effective methodologies to improve the productivity and yield of semiconductor manufacturing.…
GraSSNet: Graph Soft Sensing Neural Networks
Yu Huang, Chao Zhang, Jaswanth Yella +5
In the era of big data, data-driven based classification has become an essential method in smart manufacturing to guide production and optimize inspection. The industrial data obta…
Soft Sensing Transformer: Hundreds of Sensors are Worth a Single Word
Chao Zhang, Jaswanth Yella, Yu Huang +4
With the rapid development of AI technology in recent years, there have been many studies with deep learning models in soft sensing area. However, the models have become more compl…
IEEE BigData 2021 Cup: Soft Sensing at Scale
Sergei Petrov, Chao Zhang, Jaswanth Yella +3
IEEE BigData 2021 Cup: Soft Sensing at Scale is a data mining competition organized by Seagate Technology, in association with the IEEE BigData 2021 conference. The scope of this c…