2 papers
physics.acc-ph2025
Multi-beam-energy control unit based on triple bend achromats
Liuyang Wu, Zihan Zhu, Bingyang Yan +2
X-ray free electron lasers (XFELs) are the new generation of particle accelerator-based light sources, capable of producing tunable, high-power X-ray pulses that are increasingly v…
physics.acc-ph2025
Cavity-based compact light source for extreme ultraviolet lithography
Changchao He, Hanxiang Yang, Nanshun Huang +2
A critical technology for high-volume manufacturing of nanoscale integrated circuits is a high-power extreme ultraviolet (EUV) light source. Over the past decades, laser-produced p…