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cs.LG2025
DiffPattern-Flex: Efficient Layout Pattern Generation via Discrete Diffusion
Zixiao Wang, Wenqian Zhao, Yunheng Shen +4
Recent advancements in layout pattern generation have been dominated by deep generative models. However, relying solely on neural networks for legality guarantees raises concerns i…
cs.LG2025
TorchResist: Open-Source Differentiable Resist Simulator
Zixiao Wang, Jieya Zhou, Su Zheng +5
Recent decades have witnessed remarkable advancements in artificial intelligence (AI), including large language models (LLMs), image and video generative models, and embodied AI sy…