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cond-mat.mtrl-sci2024
Polarity Effect on the Heteroepitaxial Growth of BxC on 4H-SiC by CVD
François Cauwet, Yamina Benamra, Laurent Auvray +2
The chemical vapor deposition (CVD) growth of boron carbide (B x C) layers on 4H-SiC, 4{\textdegree}off substrates was studied. Depending on the polarity of the substrate, differen…
cond-mat.mtrl-sci2023
Epitaxial Growth of Boron Carbide on 4H-SiC
Yamina Benamra, Laurent Auvray, Jérôme Andrieux +6
In this work, the successful heteroepitaxial growth of boron carbide (B x C) on 4HSiC(0001) 4{\textdegree} off substrate using chemical vapor deposition (CVD) is reported. Towards…