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cond-mat.mtrl-sci2026
Modulation-Doped Field-Effect Transistors with 6 kV Breakdown
Julian Gervassi Saga, Joshua T Buontempo, Nabasindhu Das +3
modulation-doped field-effect transistors (MODFETs) incorporating a high-quality Al2O3 gate dielectric and SiNx passivation are demonstrate…
cond-mat.mtrl-sci2024
In-situ Patterned Damage-Free Etching of 3-Dimensional Structures in \b{eta}-Ga2O3 using Triethylgallium
Nabasindhu Das, Fikadu Alema, William Brand +4
In this work, we report on the anisotropic etching characteristics of \b{eta}-Ga2O3 using triethylgallium (TEGa) performed in-situ within an MOCVD chamber. At sufficiently high sub…