2 papers
physics.app-ph2024
Open-Source Differentiable Lithography Imaging Framework
Guojin Chen, Hao Geng, Bei Yu +1
The rapid evolution of the electronics industry, driven by Moore's law and the proliferation of integrated circuits, has led to significant advancements in modern society, includin…
cs.AI2024
Differentiable Edge-based OPC
Guojin Chen, Haoyu Yang, Haoxing Ren +2
Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based…