Heterogeneous integration of high endurance ferroelectric and piezoelectric epitaxial BaTiO${}_3$ devices on Si

Asraful Haque, Harshal Jason D'Souza, Shubham Kumar Parate +3

Integrating epitaxial BaTiO${}_3$ (BTO) with Si is essential for leveraging its ferroelectric, piezoelectric, and nonlinear optical properties in microelectronics. Recently, heteroge…