157 citations · 882 across the 27 of their papers we have counts for
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M. Stoffel, A. Malachias, T. Merdzhanova +6
We investigate the effect of strain on the etching rate of two SiGe wet etchants, namely NH4OH:H2O2 and H2O2. For both etchants, we found that there is no appreciable strain select…