Identification of annealing temperature for high-$\kappa$-based gate oxides using differential scanning calorimetry

Debaleen Biswas, Anil Kumar Sinha, Supratic Chakraborty

This article identifies the process of crystallization of thin high-$\kappa$ dielectric films and an optimal range of annealing temperature in the field of high-$\kappa$ dielectric-based met…