Identification of annealing temperature for high-$\kappa$-based gate oxides using differential scanning calorimetry

Abstract

This article identifies the process of crystallization of thin high-$\kappa$ dielectric films and an optimal range of annealing temperature in the field of high-$\kappa$ dielectric-based metal-oxide-semiconductor (MOS) technology for its improved electrical performances. Differential Scanning Calorimetry (DSC) technique is employed to understand the thermal behaviour of thin high-$\kappa$ dielectric films of HfO${}_2$, deposited by rf sputtering, on Si. The exothermic trends of the DSC signal and Grazing Incidence X-ray diffraction (GIXRD) data indicate an amorphous to crystalline transition in the high-$\kappa$ film at higher temperature. The enthalpy-temperature variation shows a glass temperature (T${}_g$) at $\sim$ 590 ${}^o$C beyond which an amorphous to m-HfO${}_2$ crystalline transition takes place. Further, the Hf-Silicate formation, observed in DSC measurement and corroborated by Fourier transformed Infrared Spectroscopy (FT-IR) studies, indicates that the process of formation of Hf-Silicate begins at $\sim$ 717 ${}^{o}C$. High-frequency (HF) capacitance-voltage $(C-V)$ and current density - voltage $(J-V)$ characteristics establish that the crystallization of the film is not the root cause of degradation of the electrical properties of the high-$\kappa$-based MOS devices, rather the device degrades due to formation of interfacial Hf-Silicate.

14 pages, 6 figures