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cond-mat.mtrl-sci2024
Crack-free ScAlN(000) layers grown on Si(111) by plasma-assisted molecular beam epitaxy
Duc V. Dinh, Zhuohui Chen, Oliver Brandt
We investigate the synthesis of 340-nm-thick ScAlN layers with on AlN-buffered Si(111) by plasma-assisted molecular beam epitaxy. We employ an AlN…
cond-mat.mtrl-sci2024
Growth of compositionally uniform layers with low relaxation degree on GaN by molecular beam epitaxy
Jingxuan Kang, Mikel Gómez Ruiz, Duc Van Dinh +7
500-nm-thick layers with 0.05-0.14 are grown using plasma-assisted molecular beam epitaxy, and their properties are assessed by a…