most citedIdentification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

7 citations · 9 across the 5 of their papers we have counts for

collaborators
Showing cs.OHShow all

5 papers · 1 filter

cs.OH2008

Mechanical Fatigue on Gold MEMS Devices: Experimental Results

Giorgio De Pasquale, Aurelio Somà, Alberto Ballestra

The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical l…

cs.OH2008

RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress

Alberto Ballestra, Eugenio Brusa, Giorgio De Pasquale +2

In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work complet…

cs.OH20081 cited

Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

T. Veijola, Giorgio De Pasquale, Aurelio Somà

Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of th…

cs.OH20081 cited

Experimental Characterization of the static behaviour of microcatntilevers electrostatically actuated

A. Ballestra, E. Brusa, M. G. Munteanu +1

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, ba…

cs.OH20087 cited

Identification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

A. Soma, G. De Pasquale

In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effec…