Mechanical Fatigue on Gold MEMS Devices: Experimental Results
arXiv:0805.0945
Abstract
The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage measurements. Measurements are performed by means of the optical interferometric technique.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)