5 citations · 5 across the 3 of their papers we have counts for
4 papers
Design and Fabrication of a Novel Micro Electromagnetic Actuator
C. -Y. Lee, Zgen-Hui Chen, Hsien-Tseng Chang +2
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate…
A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
Y. -H. Wang, Tzu-Han Hsueh, Rong-Hua Ma +4
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses…
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
Yu-Hsiang Wang, C. -C. Hsiao, Chia-Yen Lee +2
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in whi…
Design and Modeling of a Mems-Based Valveless Pump Driven by an Electromagnetic Force
Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen
A novel valveless micro impedance pump is proposed and analyzed in this study.