Design and Fabrication of a Novel Micro Electromagnetic Actuator
arXiv:0805.0935
Abstract
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)