10 citations · 15 across the 5 of their papers we have counts for
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cs.OH2008
A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
Renaud Robin, Salim Touati, Karim Segueni +2
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structur…
cs.OH2008
Silicon on Nothing Mems Electromechanical Resonator
C. Durand, F. Casset, P. Ancey +7
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro…
cs.OH2007
Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response
A. -S. Rollier, M. Faucher, B. Legrand +2
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theor…