2 papers
cs.OH2008
Silicon on Nothing Mems Electromechanical Resonator
C. Durand, F. Casset, P. Ancey +7
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro…
cs.OH2007
Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response
A. -S. Rollier, M. Faucher, B. Legrand +2
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theor…