5 citations · 8 across the 3 of their papers we have counts for
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cs.OH2008★ 5 cited
A novel method for fatigue testing of MEMS devices containing movable elements
Z. Szucs, M. Rencz
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a ca…
cs.OH2008★ 3 cited
Comparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors
G. Nagy, Z. Szucs, S. Hodossy +2
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first soluti…