5 citations · 8 across the 3 of their papers we have counts for
3 papers
cs.OH2008★ 5 cited
A novel method for fatigue testing of MEMS devices containing movable elements
Z. Szucs, M. Rencz
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a ca…
cs.OH2008★ 3 cited
Comparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors
G. Nagy, Z. Szucs, S. Hodossy +2
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first soluti…
physics.gen-ph2008
Vibration Combined High Temperature Cycle Tests for Capacitive MEMS Accelerometers
Z. Szucs, G. Nagy, S. Hodossy +2
In this paper vibration combined high temperature cycle tests for packaged capacitive SOI-MEMS accelerometers are presented. The aim of these tests is to provide useful Design for…