5 papers
Information-Theoretic Causal Modelling of Semiconductor Process Dynamics
Daniel Sørensen, Giorgio Melchiorre, Sudip Bandyopadhyay +3
With the progress of the semiconductor industry toward increasingly complex compute devices and tighter process tolerances, advanced process control has become crucial. This work e…
High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology
Johannes Boehm, Bappaditya Dey
Advanced semiconductor nodes drastically increased demand for Transmission Electron Microscopy (TEM), yet destructive sample preparation, slow imaging and high costs severely limit…
Unsupervised Anomaly Prediction with N-BEATS and Graph Neural Network in Multi-variate Semiconductor Process Time Series
Daniel Sorensen, Bappaditya Dey, Minjin Hwang +1
Semiconductor manufacturing is an extremely complex and precision-driven process, characterized by thousands of interdependent parameters collected across diverse tools and process…
Continuous Wavelet Transform and Siamese Network-Based Anomaly Detection in Multi-variate Semiconductor Process Time Series
Bappaditya Dey, Daniel Sorensen, Minjin Hwang +1
Semiconductor manufacturing is an extremely complex process, characterized by thousands of interdependent parameters collected across diverse tools and process steps. Multi-variate…
Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review
Enrique Dehaerne, Bappaditya Dey, Victor Blanco +1
In this review, automatic defect inspection algorithms that analyze Scanning Electron Microscopy (SEM) images for Semiconductor Manufacturing (SM) are identified, categorized, and…