144 citations · 248 across the 7 of their papers we have counts for
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physics.optics2013★ 3 cited
Improved surface quality of anisotropically etched silicon {111} planes for mm-scale integrated optics
J. P. Cotter, I. Zeimpekis, M Kraft +1
We have studied the surface quality of millimeter-scale optical mirrors produced by etching CZ and FZ silicon wafers in potassium hydroxide to expose the planes. We find…
physics.optics2012★ 12 cited
ICP polishing of silicon for high quality optical resonators on a chip
A. Laliotis, M. Trupke, J. P. Cotter +3
Miniature concave hollows, made by wet etching silicon through a circular mask, can be used as mirror substrates for building optical micro-cavities on a chip. In this paper we inv…