12 citations · 26 across the 3 of their papers we have counts for
3 papers
Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
María Ángela Pampillón, Pedro Carlos Feijoo, Enrique San Andrés +2
Thin gadolinium metallic layers were deposited by high-pressure sputtering in pure Ar atmosphere. Subsequently, in situ thermal oxidation was performed at temperatures ranging from…
High Pressure Sputtering For Kigh-k Dielectric Deposition. Is It Worth Trying?
Enrique San Andrés, Pedro Carlos Feijoo, María Ángela Pampillón +2
Our research group studies the deposition of high permittivity dielectrics by a non-standard method: high-pressure sputtering. The dielectrics studied here are gadolinium scandate…
Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
María Ángela Pampillón, Pedro Carlos Feijoo, Enrique San Andrés +4
AmorphousGd2O3 and Sc2O3 thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce the uncontrolled interfacial SiOx growth, firstly a metallic film of…