most citedCombining unsupervised and supervised learning in microscopy enables defect analysis of a full 4H-SiC wafer

2 citations · 2 across the 1 of their papers we have counts for

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1 paper

cs.CV2024★ 2 cited

Combining unsupervised and supervised learning in microscopy enables defect analysis of a full 4H-SiC wafer

Binh Duong Nguyen, Johannes Steiner, Peter Wellmann +1

Detecting and analyzing various defect types in semiconductor materials is an important prerequisite for understanding the underlying mechanisms as well as tailoring the production…