Atomic-scale investigation of $\gamma$-Ga${}_2$O${}_3$ deposited on MgAl${}_2$O${}_4$ and its relationship with $\beta$-Ga${}_2$O${}_3$

J. Tang, K. Jiang, C. Xu +4

Nominally phase-pure $\gamma$-$G{a}_2{O}_3$ was deposited on (100) $MgA{l}_2{O}_4$ within a narrow temperature window centered at $\sim$470 ${}^{\circ }$C using metal-organic chemical vapor deposi…