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physics.app-ph2023★ 32 cited
Resistless EUV lithography: photon-induced oxide patterning on silicon
Li-Ting Tseng, Prajith Karadan, Dimitrios Kazazis +7
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading litho…
physics.app-ph2023★ 6 cited
Altermagnetic lifting of Kramers spin degeneracy
J. Krempaský, L. Šmejkal, S. W. D'Souza +20
Lifted Kramers spin-degeneracy has been among the central topics of condensed-matter physics since the dawn of the band theory of solids. It underpins established practical applica…