3 papers
physics.chem-ph2024
Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD
Yuri Barsukov, Igor D. Kaganovich, Mikhail Mokrov +1
The objective of this study is to explore conditions that facilitate a significant reduction in substrate temperature during diamond growth. The typical temperature for this proces…
physics.chem-ph2023
Compact and accurate chemical mechanism for methane pyrolysis with PAH growth
Alexander Khrabry, Igor D. Kaganovich, Yuri Barsukov +3
A reliable and compact chemical mechanism of gas-phase methane pyrolysis leading to formation of large polycyclic aromatic hydrocarbon (PAH) molecules has been developed. This mode…
physics.chem-ph2023
Plasma processes affecting etching and growth of nitride materials
Yuri Barsukov
The main goal of this research was to determine the key reagents during the highly Si3N4/SiO2 selective etching. The experiments were conducted, where both Si3N4 and SiO2 samples w…