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physics.plasm-ph2022★ 22 cited
Vlasov Simulation of Emissive Plasma Sheath with Energy-Dependent Secondary Emission Coefficient and Improved Modeling for Dielectric Charging Effects
Guang-Yu Sun, Shu Zhang, Bao-Hong Guo +2
A one dimensional Vlasov Poisson simulation code is employed to investigate the plasma sheath considering electron induced secondary electron emission (SEE) and backscattering. The…
physics.plasm-ph2022★ 13 cited
On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
Shu Zhang, Guang-Yu Sun, Jian Chen +3
Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PI…