Orientation-Dependent Atomic-Scale Mechanism of $\beta$-${\mathrm{Ga}}_2{\mathrm{O}}_3$ Thin Film Epitaxial Growth

Jun Zhang, Junlei Zhao, Junting Chen +1

$\beta$-${\mathrm{Ga}}_2{\mathrm{O}}_3$ has gained intensive interests of research and application as an ultrawide bandgap semiconductor. Epitaxial growth technique of the $\beta$-$\mathrm…